Ellipsometry
Manufacturers of optics, semiconductor and optical data storage share the same problem: how to control the thickness of thin films or layers? The measurement has to be fast,…
Inspection for Process Optimization
Any production line of optical media requires inspection tools in order to maintain high quality standards. Shape and depth of structures have to meet strict…
Highly Stable Lasers for Scatterometry
In strive for ever more capable electronics, advanced processes led to an increase in complicated 3D structures (i.e. FinFET and others). To keep manufacturing…