Lithography Optics Inspection
Inspection of lithography optics with coherent cw laser light Using wavelengths of 193 or 248 nm (Excimer laser wavelengths) For highest spatial resolution…
Lithography Optics Inspection
Inspection of lithography optics with coherent cw laser light Using wavelengths of 193 or 248 nm (Excimer laser wavelengths) For highest spatial resolution…
Distance Metrology
Measuring distances or object lengths Providing positions over long distances Used in geodesy, sports, hunting or military Achieves millimeter accuracy
Using of Laser…
Distance Metrology
Measuring distances or object lengths Providing positions over long distances Used in geodesy, sports, hunting or military Achieves millimeter accuracy
Using of Laser…