TopWave 405

Cost-efficient, gas laser replacement – for easy, hands-off operation in lithography and holography applications

  • Low cost of operation
  • 1 Watt @ 405 nm   
  • Excellent beam quality,  typical M² = 1.15
  • Coherence length > 100 m
  • Perfect fit for lithography and holography applications

The TopWave 405 is the ideal replacement for the bulky and power hungry Krypton ion (406.7nm and 413.1nm) gas lasers commonly used in lithographic and holographic applications. The TopWave 405 provides 1 W output power at 405 nm combined with an excellent beam quality. Beam diameter and M² (typ. 1.15) are designed to match the established gas laser parameters, hence allow for an easy integration without significant changes to the optical system. The noticeably higher coherence length (> 100 m) results in a clear advantage with regard to stable pattern generation in interference lithography or holography.

Highest Efficiency – low cost of ownership

While gas lasers require several kilowatts of electrical power and cumbersome water-cooling, the “all‑semiconductor” TopWave 405 draws less than 100 W and does not require water-cooling to produce similar optical output power. This alone results in a significant reduction in cost of ownership. In addition, the user also benefits from longer service intervals and lower refurbishment costs.

  • Specification

    Wavelength 405 ± 0.5 nm
    Linewidth (@ 5 us) < 1 MHz
    Coherence length > 100 m
    Output Power 1 W

    Beam Waist Diameter 1.5 ± 0.2 mm
    Beam Waist location Front bezel ± 25% of Rayleigh range
    Transverse Mode TEM00
    M² typ. (max.) 1.15 (≤ 1.3)
    Beam Divergence (full-angle) ≤ 0.6 mrad
    Beam Ellipticity 0.9 - 1.1
    Astigmatism ± 25% of Rayleigh range
    Beam Pointing Stability 1 ≤ 5 µrad
    Polarization linear, vertical, ± 3°, > 100:1
    Output Power Stability (over 8h) ≤ 1 %
    RMS Noise (10 Hz - 10 MHz) ≤ 0.6 %
    Warm-Up Time
        Cold Start
        From Standby

    < 2 h
    < 15 min
    Lifetime > 5000 h
    Utility and Environmental Requirements
    Laser Head
        Dimensions  (H x W x D)
        Weight
        Cooling

    127 x 295 x 500 mm
    22 kg
    Conduction 2
    Umbilical Length 2 m
    Control Unit
        Dimensions (H x W x D)
        Weight
        Cooling

    154 x 450 x 348 mm
    9 kg
    Convection
    Operating Temperature Range 20 to 30 °C, stabilized to ± 1 °C, non-condensing
    Shipping Requirements -10 to +50 °C, shipping in a non-condensing environment
    Power Supply AC 100-240 V, 50/60 Hz
    Power Consumption  < 100 W
    Communication Interface Ethernet, USB
    1 Ambient temperature drift less than ± 1 K
    2 Sufficient heat sink has to be provided. Optional cooling plate with closed loop chiller available
  • Applications

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