TopWave 405

具有成本效益的气体激光器替代品–在光刻和全息应用中轻松进行手动操作

  •     运营成本低
  •     1瓦@ 405nm
  •     优异的光束质量,典型M²= 1.15
  •     相干长度> 100 m

TopWave 405是光刻和全息应用中常用的笨重且耗电的Kr氪 406.7nm和413.1nm)气体激光器的理想替代品。 TopWave 405在405 nm处提供1 W输出功率,并具有出色的光束质量。光束直径和M²(典型值1.15)设计为与已建立的气体激光参数匹配,因此可以轻松集成,而无需对光学系统进行重大更改。相干长度显着较高(> 100 m),在干涉光刻全息术中稳定图形产生方面具有明显的优势。

高效率–低成本

气体激光器需要几千瓦的电功率并需要繁琐的水冷,而“全半导体” TopWave 405的功耗不到100 W,并且不需要水冷即可产生类似的光输出功率。仅此一项就可以大大降低拥有成本。此外,用户还可以受益于更长的服务间隔和更低的翻新成本。

  • Specification

    Wavelength 405 ± 0.5 nm
    Linewidth (@ 5 us) < 1 MHz
    Coherence length > 100 m
    Output Power 1 W

    Beam Waist Diameter 1.5 ± 0.2 mm
    Beam Waist location Front bezel ± 25% of Rayleigh range
    Transverse Mode TEM00
    M² typ. (max.) 1.15 (≤ 1.3)
    Beam Divergence (full-angle) ≤ 0.6 mrad
    Beam Ellipticity 0.9 - 1.1
    Astigmatism ± 25% of Rayleigh range
    Beam Pointing Stability * ≤ 5 µrad
    Polarization linear, vertical, ± 3°, > 100:1
    Output Power Stability (over 8h) ≤ 1 %
    RMS Noise (10 Hz - 10 MHz) ≤ 0.6 %
    Warm-Up Time
        Cold Start
        From Standby

    < 2 h
    < 15 min
    Lifetime > 5000 h
    Utility and Environmental Requirements
    Laser Head
        Dimensions  (H x W x D)
        Weight
        Cooling

    127 x 295 x 500 mm3
    22 kg
    Conduction **
    Umbilical Length 2 m
    Control Unit
        Dimensions (H x W x D)
        Weight
        Cooling

    154 x 450 x 348 mm3
    9 kg
    Convection
    Operating Temperature Range 20 to 30 °C, stabilized to ± 1 °C, non-condensing
    Shipping Requirements -10 to +50 °C, shipping in a non-condensing environment
    Power Supply AC 100-240 V, 50/60 Hz
    Power Consumption  < 100 W
    Communication Interface Ethernet, USB
    * Ambient temperature drift less than ± 1 K
    ** Sufficient heat sink has to be provided. Optional cooling plate with closed loop chiller available
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