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Moore’s law is king: Striving for ever smaller structures is the clear target of microlithography. Whilst many researchers opt for excimer lasers, there is still a market for longer wavelengths in the visible regime. Traditional lithography systems relied on HeCd gas lasers, but progressive imaging systems have switched to violet diode lasers.
The advantages over gas lasers are manifold: Gas lasers always operate in CW mode and pulse generation has to be performed by external modulators. Diode lasers, however, can be pulsed at high frequencies. Different levels of imaging, so called gray-scaling, is accomplished simply by pulse width modulation.
Typical run times of blue gas lasers are a few thousand hours. Violet diode lasers exceed that level by a factor of two or three, improving the uptime of your system. Moreover, TOPTICA’s industrial lasers iBeam and iPulse are able to predict the expected end of life of the diode and give you the chance to plan an exchange during regular downtimes of your system. No gas laser has ever been able to do so.
The impact of heat is disadvantageous to high resolution imaging systems. Local heating causes distortions of your mask that need to be taken into account. Why not avoid this drawback? Diode lasers consume less than a tenth of the power required for gas lasers to achieve the same output intensity. By using TOPTICA’s patented fiber coupler FiberDock, you can operate the laser remote from your lithography system, avoiding any heat transfer to the photo resist.
For suitable lasers for microlithography go to iBeam or iPulse.
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TOPTICA Photonics AG
Lochhamer Schlag 19
82166 Graefelfing (Munich)
Germany
T +49 89 85837-0
F +49 89 85837-200
TOPTICA Photonics Inc.
1286 Blossom Drive
Victor, NY 14564
USA
T 585.657.6663
F 877.277.9897
 sales@toptica.com
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