Manufacturers of optics, semiconductor and optical data storage share the same problem: how to control the thickness of thin films or layers? The measurement has to be fast, non-destructive and, most of all, very precise. Therefore, laser-based methods are the first choice, ellipsometry the way to go.
If a polarized laser beam is reflected off a thin film, the polarization vector changes according to the film thickness. By analyzing the reflected beam, the thickness can be calculated and used for adjustment of production parameters. TOPTICA’s industrial lasers iBeam and iPulse provide a polarization ratio of more than 100:1, meeting the needs of ellipsometry.
When scanning a field of interest, both power stability and pointing stability are crucial. Regardless of when a film or layer is measured, you want to make sure to always obtain the same results.
For automation, full computer control is a must. TOPTICA's OEM lasers feature an RS 232 interface and simple software commands. To save space, both laser head and power supply were combined into one housing with very compact footprint.
For suitable lasers for ellipsometry go to iBeam.